JPS633155Y2 - - Google Patents

Info

Publication number
JPS633155Y2
JPS633155Y2 JP1987035255U JP3525587U JPS633155Y2 JP S633155 Y2 JPS633155 Y2 JP S633155Y2 JP 1987035255 U JP1987035255 U JP 1987035255U JP 3525587 U JP3525587 U JP 3525587U JP S633155 Y2 JPS633155 Y2 JP S633155Y2
Authority
JP
Japan
Prior art keywords
wafer
holder
container
wafer holder
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987035255U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62147332U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987035255U priority Critical patent/JPS633155Y2/ja
Publication of JPS62147332U publication Critical patent/JPS62147332U/ja
Application granted granted Critical
Publication of JPS633155Y2 publication Critical patent/JPS633155Y2/ja
Expired legal-status Critical Current

Links

JP1987035255U 1987-03-12 1987-03-12 Expired JPS633155Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987035255U JPS633155Y2 (en]) 1987-03-12 1987-03-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987035255U JPS633155Y2 (en]) 1987-03-12 1987-03-12

Publications (2)

Publication Number Publication Date
JPS62147332U JPS62147332U (en]) 1987-09-17
JPS633155Y2 true JPS633155Y2 (en]) 1988-01-26

Family

ID=30844578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987035255U Expired JPS633155Y2 (en]) 1987-03-12 1987-03-12

Country Status (1)

Country Link
JP (1) JPS633155Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0622980Y2 (ja) * 1988-09-28 1994-06-15 日本エー・エス・エム株式会社 Ｃｖｄ装置における基板支持装置
JPH06818Y2 (ja) * 1989-09-21 1994-01-05 日本エー・エス・エム株式会社 Ｃｖｄ装置のための基板支持装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5821025B2 (ja) * 1976-10-20 1983-04-26 松下電器産業株式会社 気相化学蒸着装置

Also Published As

Publication number Publication date
JPS62147332U (en]) 1987-09-17

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